25 citations · 46 across the 25 of their papers we have counts for
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cond-mat.mtrl-sci2015
Interstitial diffusion of arsenic in silicon
O. I. Velichko
The mechanism underlying the long-range interstitial migration of nonequilibrium impurity interstitial species is used to simulate arsenic redistribution in ion implantation. An ex…
cond-mat.mtrl-sci2015
On concentration dependence of arsenic diffusivity
O. I. Velichko
An analysis of the equations used for modeling thermal arsenic diffusion in silicon has been carried out. It was shown that for arsenic diffusion governed by the vacancy-impurity p…
cond-mat.mtrl-sci2015
Different shapes of impurity concentration profiles formed by long-range interstitial migration
O. I. Velichko
A model of interstitial impurity migration is proposed which explains the redistribution of ion-implanted boron in low-temperature annealing of nonamorphized silicon layers. It is…