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Solution of the nonstationary diffusion equation for interstitial impurity atoms by the method of Green functions
O. I. Velichko, O. N. Burunova
On the basis of the Green function method, analytical solutions of the diffusion equation which describes nonstationary migration of nonequilibrium interstitial impurity atoms have…
Analytical solution of the equations describing interstitial migration of impurity atoms
O. I. Velichko, N. A. Sobolevskaya
An analytical solution of the equations describing impurity diffusion due to the migration of nonequilibrium impurity interstitial atoms was obtained for the case of the Robin boun…
Set of equations for transient enhanced diffusion in shallow ion-implanted layers
O. I. Velichko, Yu. P. Shaman, A. K. Fedotov +1
To simulate the transient enhanced diffusion near the surface or interface, a set of equations describing the impurity diffusion and quasichemical reactions of dopant atoms and poi…
Simulation of Arsenic Diffusion During Rapid Thermal Annealing of Silicon Layers Doped with Low-Energy High-Dose Ion Implantation
O. I. Velichko, A. M. Mironov, V. A. Tsurko +1
The model of transient enhanced diffusion of ion-implanted As is formulated and the finite-difference method for numerical solution of the system of equations obtained is developed…