Global-in-time Spectral Duhamel-Picard Method for Post-Exposure Bake Simulation and Physics-Informed Neural Operators for EUV Lithography

Doyun Kim, Mircea Dusa, Werner Gilijns +1

We present a global-in-time spectral Duhamel-Picard method with polynomial expansions for post-exposure bake (PEB) simulation. The coupled acid-quencher reaction-diffusion equation…