most citedDeep Learning-Based Defect Classification and Detection in SEM Images

33 citations · 34 across the 2 of their papers we have counts for

collaborators

2 papers

cs.CV2022★ 1 cited

Deep Learning based Defect classification and detection in SEM images: A Mask R-CNN approach

Bappaditya Dey, Enrique Dehaerne, Kasem Khalil +3

In this research work, we have demonstrated the application of Mask-RCNN (Regional Convolutional Neural Network), a deep-learning algorithm for computer vision and specifically obj…

eess.IV2022★ 33 cited

Deep Learning-Based Defect Classification and Detection in SEM Images

Bappaditya Deya, Dipam Goswamif, Sandip Haldera +3

This proposes a novel ensemble deep learning-based model to accurately classify, detect and localize different defect categories for aggressive pitches and thin resists (High NA ap…