Access Rate-Dependent Endurance Behavior of Ferroelectric Hafnium Zirconium Oxide Capacitors

Roberto Guido, Julie Laguerre, Pramoda Vishnumurthy +6

Fluorite-structured ferroelectrics, such as hafnium zirconium oxide ($H{f}_{1-x}Z{r}_x{O}_2$), are among the most promising materials for developing the next generation of low-power…