32 citations · 65 across the 3 of their papers we have counts for
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Erosion behaviour of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres
Robert Franz, Francisca Mendez Martin, Gerhard Hawranek +1
AlCr composite cathodes with Al contents of x = 0.75, 0.5 and 0.25 were exposed to cathodic arc plasmas in Ar, N and O atmospheres and their erosion behaviour…
Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO film growth
Robert Franz, César Clavero, Jonathan Kolbeck +1
The ion energies and fluxes in the high power impulse magnetron sputtering plasma from a Nb target were analysed angularly resolved along the tangential direction of the racetrack.…
Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres
Robert Franz, Peter Polcik, André Anders
The energy distribution functions of ions in the cathodic arc plasma using composite AlCr cathodes were measured as a function of the background gas pressure in the range 0.5 to 3.…