Erosion behaviour of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Abstract

Al${}_x$Cr${}_{1-x}$ composite cathodes with Al contents of x = 0.75, 0.5 and 0.25 were exposed to cathodic arc plasmas in Ar, N${}_2$ and O${}_2$ atmospheres and their erosion behaviour was studied. Cross-sectional analysis of the elemental distribution of the near-surface zone in the cathodes by scanning electron microscopy revealed the formation of a modified layer for all cathodes and atmospheres. Due to intermixing of Al and Cr in the heat-affected zone, intermetallic Al-Cr phases formed as evidenced by X-ray diffraction analysis. Cathode poisoning effects in the reactive N${}_2$ and O${}_2$ atmospheres were non-uniform as a result of the applied magnetic field configuration. With the exception of oxide islands on Al-rich cathodes, reactive layers were absent in the circular erosion zone, while nitrides and oxides formed in the less eroded centre region of the cathodes.

9 pages, 9 figures, submitted to Journal of Vacuum Science and Technology A