Erosion behaviour of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Robert Franz, Francisca Mendez Martin, Gerhard Hawranek +1

Al${}_x$Cr${}_{1-x}$ composite cathodes with Al contents of x = 0.75, 0.5 and 0.25 were exposed to cathodic arc plasmas in Ar, N${}_2$ and O${}_2$ atmospheres and their erosion behaviour…