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physics.ins-det2017★ 3 cited
Vacuum Quality Monitoring of Analytical Sputter Depth Profile Equipment by Recontamination Measurements of a Sputtered Ti Surface
Uwe Scheithauer
Often a surface sensitive analytical technique in combination with sample erosion by inert ion sputtering is used for compositional in-depth analysis of solid state samples. Layer…
physics.ins-det2014★ 7 cited
Characterisation of the primary X-ray source of an XPS microprobe Quantum 2000
U. Scheithauer
The outstanding design feature of an XPS microprobe Quantum 2000 is the double focussing ellipsoidally shaped quartz monochromator of the X-ray source. This device monochromatizes…