223 citations · 309 across the 3 of their papers we have counts for
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cond-mat.mtrl-sci2018★ 73 cited
Finite Size Effects in Highly Scaled Ruthenium Interconnects
Shibesh Dutta, Kristof Moors, Michiel Vandemaele +1
Ru has been considered a candidate to replace Cu-based interconnects in VLSI circuits. Here, a methodology is proposed to predict the resistivity of (Ru) interconnects. First, the…
cond-mat.mtrl-sci2017★ 223 cited
Thickness dependence of the resistivity of Platinum group metal thin films
Shibesh Dutta, Kiroubanand Sankaran, Kristof Moors +6
We report on the thin film resistivity of several platinum-group metals (Ru, Pd, Ir, Pt). Platinum-group thin films show comparable or lower resistivities than Cu for film thicknes…