most citedSingle crystal silicon capacitors with low microwave loss in the single photon regime

55 citations · 55 across the 1 of their papers we have counts for

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1 paper

cond-mat.mes-hall2011★ 55 cited

Single crystal silicon capacitors with low microwave loss in the single photon regime

S. Weber, K. W. Murch, D. H. Slichter +2

We have fabricated superconducting microwave resonators in a lumped element geometry using single crystal silicon dielectric parallel plate capacitors with C >2 pF. Aluminum device…