18 citations · 33 across the 3 of their papers we have counts for
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cond-mat.mtrl-sci2013★ 15 cited
Heteroepitaxy of Group IV-VI Nitrides by Atomic Layer Deposition
Jeffrey A. Klug, Nicholas G. Becker, Nickolas R. Groll +5
Heteroepitaxial growth of selected group IV-VI nitrides on various orientations of sapphire (α-Al2O3) is demonstrated using atomic layer deposition. High quality, epitaxial films a…
cond-mat.mtrl-sci2011
Atomic layer deposition and superconducting properties of NbSi films
Thomas Proslier, Jeffrey A. Klug, Jeffrey W. Elam +3
Atomic layer deposition was used to synthesize niobium silicide (NbSi) films with a 1:1 stoichiometry, using NbF5 and Si2H6 as precursors. The growth mechanism at 200oC was examine…