18 citations · 33 across the 3 of their papers we have counts for
4 papers
Atomic Layer deposition of 2D and 3D standards for quantitative synchrotron-based composition and structural analysis methods
Nicholas G. Becker, Anna Butterworth, Andrey Sokolov +5
The use of Standard Reference Materials (SRM) from the National Institute of Standards and Technology (NIST) for quantitative analysis of chemical composition using Synchrotron bas…
Tunneling spectroscopy of superconducting MoN and NbTiN grown by atomic layer deposition
Nickolas Groll, Jeffrey A. Klug, Chaoyue Cao +6
A tunneling spectroscopy study is presented of superconducting MoN and NbTiN thin films grown by atomic layer deposition (ALD). The films exhibited a superconductin…
Heteroepitaxy of Group IV-VI Nitrides by Atomic Layer Deposition
Jeffrey A. Klug, Nicholas G. Becker, Nickolas R. Groll +5
Heteroepitaxial growth of selected group IV-VI nitrides on various orientations of sapphire (α-Al2O3) is demonstrated using atomic layer deposition. High quality, epitaxial films a…
Atomic layer deposition and superconducting properties of NbSi films
Thomas Proslier, Jeffrey A. Klug, Jeffrey W. Elam +3
Atomic layer deposition was used to synthesize niobium silicide (NbSi) films with a 1:1 stoichiometry, using NbF5 and Si2H6 as precursors. The growth mechanism at 200oC was examine…