2 papers
physics.ins-det2017
Atomic Layer deposition of 2D and 3D standards for quantitative synchrotron-based composition and structural analysis methods
Nicholas G. Becker, Anna Butterworth, Andrey Sokolov +5
The use of Standard Reference Materials (SRM) from the National Institute of Standards and Technology (NIST) for quantitative analysis of chemical composition using Synchrotron bas…
cond-mat.mtrl-sci2011
Atomic layer deposition and superconducting properties of NbSi films
Thomas Proslier, Jeffrey A. Klug, Jeffrey W. Elam +3
Atomic layer deposition was used to synthesize niobium silicide (NbSi) films with a 1:1 stoichiometry, using NbF5 and Si2H6 as precursors. The growth mechanism at 200oC was examine…