57 citations · 128 across the 6 of their papers we have counts for
7 papers
Machine learning and atomic layer deposition: predicting saturation times from reactor growth profiles using artificial neural networks
Angel Yanguas-Gil, Jeffrey W. Elam
In this work we explore the application of deep neural networks to the optimization of atomic layer deposition processes based on thickness values obtained at different points of a…
Reactor scale simulations of ALD and ALE: ideal and non-ideal self-limited processes in a cylindrical and a 300 mm wafer cross-flow reactor
Angel Yanguas-Gil, Joseph A. Libera, Jeffrey W. Elam
We have developed a simulation tool to model self-limited processes such as atomic layer deposition and atomic layer etching inside reactors of arbitrary geometry. In this work, we…
Performance of Large Area Picosecond Photo-Detectors (LAPPD)
A. V. Lyashenko, B. W. Adams, M. Aviles +14
We report on performance results achieved for recently produced LAPPDs - largest comercially available planar geometry photodetectors based on microchannel plates. These results in…
Optical and structural properties of Si doped -GaO (010) thin films homoepitaxially grown by halide vapor phase epitaxy
Bahadir Kucukgok, David J. Mandia, Jacob H. Leach +6
We report the optical, electrical, and structural properties of Si doped -GaO films grown on (010)-oriented -GaO substrate via HVPE. Our results show that, de…
Development and testing of cost-effective, 6 cm x 6 cm MCP-based photodetectors for fast timing applications
Jingbo Wang, Karen Byrum, Marcel Demarteau +8
Micro-channel plate (MCP)-based photodetectors are capable of picosecond level time resolution and sub-mm level position resolution, which makes them a perfect candidate for the ne…
A Brief Technical History of the Large-Area Picosecond Photodetector (LAPPD) Collaboration
Bernhard W. Adams, Klaus Attenkofer, Mircea Bogdan +38
The Large Area Picosecond PhotoDetector (LAPPD) Collaboration was formed in 2009 to develop large-area photodetectors capable of time resolutions measured in pico-seconds, with acc…