3 papers
cond-mat.mtrl-sci2025
Microstructural and preliminary optical and microwave characterization of erbium doped CaMoO thin films
Ignas Masiulionis, Bonnie Y. X. Lin, Sagar Kumar Seth +10
This work explores erbium-doped calcium molybdate (CaMoO) thin films grown on silicon and yttria stabilized zirconia (YSZ) substrates, as a potential solid state system for C-b…
cond-mat.mtrl-sci2025
Surrogate models to optimize plasma assisted atomic layer deposition in high aspect ratio features
Angel Yanguas-Gil, Jeffrey W. Elam
In this work we explore surrogate models to optimize plasma enhanced atomic layer deposition (PEALD) in high aspect ratio features. In plasma-based processes such as PEALD and atom…
cs.LG2024
Benchmarking large language models for materials synthesis: the case of atomic layer deposition
Angel Yanguas-Gil, Matthew T. Dearing, Jeffrey W. Elam +5
In this work we introduce an open-ended question benchmark, ALDbench, to evaluate the performance of large language models (LLMs) in materials synthesis, and in particular in the f…