53 citations · 146 across the 8 of their papers we have counts for
3 papers · 1 filter
Heteroepitaxy of Group IV-VI Nitrides by Atomic Layer Deposition
Jeffrey A. Klug, Nicholas G. Becker, Nickolas R. Groll +5
Heteroepitaxial growth of selected group IV-VI nitrides on various orientations of sapphire (α-Al2O3) is demonstrated using atomic layer deposition. High quality, epitaxial films a…
Measuring roughness of buried interfaces by sputter depth profiling
S. V. Baryshev, J. A. Klug, A. V. Zinovev +3
In this communication, we report results of a high resolution sputter depth profiling analysis of a stack of 16 alternating MgO and ZnO nanolayers grown by atomic layer deposition…
Atomic layer deposition and superconducting properties of NbSi films
Thomas Proslier, Jeffrey A. Klug, Jeffrey W. Elam +3
Atomic layer deposition was used to synthesize niobium silicide (NbSi) films with a 1:1 stoichiometry, using NbF5 and Si2H6 as precursors. The growth mechanism at 200oC was examine…