293 citations · 1.4k across the 68 of their papers we have counts for
4 papers · 1 filter
Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
D. Eremin, E. Kemaneci, M. Matsukuma +2
Phenomena taking place in capacitively coupled plasmas with large electrodes and driven at very high frequencies are studied numerically utilizing a novel energy- and charge-conser…
Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges
Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann
Simulations of Al thin film sputter depositions rely on accurate plasma and surface interaction models. Establishing the latter commonly requires a higher level of abstraction and…
Physics inspired compact modelling of BiFeO based memristors for hardware security applications
Sahitya Yarragolla, Nan Du, Torben Hemke +4
With the advent of the Internet of Things, nanoelectronic devices or memristors have been the subject of significant interest for use as new hardware security primitives. Among the…
Charge-optimized many-body interaction potential for AlN revisited to explore plasma-surface interactions
Tobias Gergs, Thomas Mussenbrock, Jan Trieschmann
Plasma-surface interactions during AlN thin film sputter deposition could be studied by means of reactive molecular dynamics (RMD) methods. This requires an interaction potential t…