293 citations · 1.4k across the 68 of their papers we have counts for
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An algebraic RF sheath model for all excitation waveforms and amplitudes, and all levels of collisionality
A. E. Elgendy, H. Hatefinia, T. Hemke +5
The boundary sheath of a low temperature plasma comprises typically only a small fraction of its volume but is responsible for many aspects of the macroscopic behavior. A thorough…
Kinetic simulation of the sheath dynamics in the intermediate radio-frequency regime
M. Shihab, A. T. Elgendy, I. Korolov +6
The dynamics of temporally modulated plasma boundary sheaths is studied in the intermediate radio frequency regime where the applied radio frequency and the ion plasma frequency ar…
Active plasma resonance spectroscopy: A kinetic functional analytic description
Jens Oberrath, Ralf Peter Brinkmann
The term "Active Plasma Resonance Spectroscopy" (APRS) denotes a class of related techniques which utilize, for diagnostic purposes, the natural ability of plasmas to resonate on o…
Continuum and Kinetic Simulations of the Neutral Gas Flow in an Industrial Physical Vapor Deposition Reactor
Kirsten Bobzin, Ralf Peter Brinkmann, Thomas Mussenbrock +4
Magnetron sputtering used for physical vapor deposition processes often requires gas pressures well below 1 Pa. Under these conditions the gas flow in the reactor is usually determ…
A phenomenological model for the description of rotating spokes in HiPIMS discharges
S Gallian, W N G Hitchon, D Eremin +2
In the ionization region above circular planar magnetrons well defined regions of high emissivity are observed, when the discharge is driven in the HiPIMS regime. Once their mode i…