98 citations · 663 across the 36 of their papers we have counts for
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Machine learning plasma-surface interface for coupling sputtering and gas-phase transport simulations
Florian Krüger, Tobias Gergs, Jan Trieschmann
Thin film processing by means of sputter deposition inherently depends on the interaction of energetic particles with a target surface and the subsequent particle transport. The le…
Multi frequency matching for voltage waveform tailoring
Frederik Schmidt, Julian Schulze, Erik Johnson +5
Customized voltage waveforms composed of a number of frequencies and used as the excitation of radio-frequency plasmas can control various plasma parameters such as energy distribu…
Consistent simulation of capacitive radio-frequency discharges and external matching networks
Frederik Schmidt, Thomas Mussenbrock, Jan Trieschmann
External matching networks are crucial and necessary for operating capacitively coupled plasmas in order to maximize the absorbed power. Experiments show that external circuits in…