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20112026
most citedThe effect of the driving frequency on the confinement of beam electrons and plasma density in low pressure capacitive discharges

98 citations · 663 across the 36 of their papers we have counts for

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physics.comp-ph2013★ 21 cited

Continuum and Kinetic Simulations of the Neutral Gas Flow in an Industrial Physical Vapor Deposition Reactor

Kirsten Bobzin, Ralf Peter Brinkmann, Thomas Mussenbrock +4

Magnetron sputtering used for physical vapor deposition processes often requires gas pressures well below 1 Pa. Under these conditions the gas flow in the reactor is usually determ…