activity
20122023
most citedAdvanced Fabrication Processes for Superconducting Very Large Scale Integrated Circuits

253 citations · 628 across the 7 of their papers we have counts for

collaborators
Showing 2012 · cond-mat.supr-conShow all

1 paper · 2 filters

cond-mat.supr-con2012★ 1 cited

Shadow evaporation of epitaxial Al/Al2O3/Al tunnel junctions on sapphire utilizing an inorganic bilayer mask

Paul B. Welander, Vladimir Bolkhovsky, Terence J. Weir +2

This letter describes a new inorganic shadow mask that has been employed for the evaporation of all-epitaxial Al/Al2O3/Al superconducting tunnel junctions. Organic resists that are…