73 citations · 105 across the 2 of their papers we have counts for
3 papers
physics.app-ph2023★ 32 cited
Resistless EUV lithography: photon-induced oxide patterning on silicon
Li-Ting Tseng, Prajith Karadan, Dimitrios Kazazis +7
In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading litho…
physics.app-ph2018
Improving the Resolution and Throughput of Achromatic Talbot Lithography
Dimitrios Kazazis, Li-Ting Tseng, Yasin Ekinci
High-resolution patterning of periodic structures over large areas has several applications in science and technology. One such method, based on the long-known Talbot effect observ…
cond-mat.mtrl-sci2016★ 73 cited
Intrinsic Ferromagnetism in the Diluted Magnetic Semiconductor Co:TiO
H. Saadaoui, X. Luo, Z. Salman +15
Here we present a study of magnetism in \CTO\ anatase films grown by pulsed laser deposition under a variety of oxygen partial pressures and deposition rates. Energy-dispersive spe…