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physics.app-ph2023★ 32 cited
Resistless EUV lithography: photon-induced oxide patterning on silicon
Li-Ting Tseng, Prajith Karadan, Dimitrios Kazazis +7
In this work, we show the feasibility of extreme ultraviolet (EUV) patterning on an HF-treated Si(100) surface in the absence of a photoresist. EUV lithography is the leading litho…
physics.app-ph2018★ 10 cited
Improving the Resolution and Throughput of Achromatic Talbot Lithography
Dimitrios Kazazis, Li-Ting Tseng, Yasin Ekinci
High-resolution patterning of periodic structures over large areas has several applications in science and technology. One such method, based on the long-known Talbot effect observ…