8 citations · 14 across the 2 of their papers we have counts for
2 papers
cond-mat.mtrl-sci2024★ 6 cited
Gadolinium scandate by high-pressure sputtering for future generations of high-k dielectrics
Pedro Carlos Feijoo, María Ángela Pampillón, Enrique San Andrés +1
Gd-rich gadolinium scandate (Gd2-xScxO3) was deposited by high-pressure sputtering on (100) silicon by alternating the deposition of lower than 0.5 nm thick films of its binary com…
cond-mat.mtrl-sci2024★ 8 cited
High-k gadolinium scandate on Si obtained by high pressure sputtering from metal targets and in-situ plasma oxidation
María Ángela Pampillón, Enrique San Andrés, Pedro Carlos Feijoo +1
This article studies the physical and electrical behavior of Gd2-xScxO3 layers grown by high pressure sputtering from metallic Gd and Sc targets. The aim is to obtain a high permit…