60 citations · 67 across the 2 of their papers we have counts for
2 papers
physics.app-ph2019★ 7 cited
Electromagnetic modeling of near-field phase-shifting contact lithography with broadband ultraviolet illumination
Fei Wang, Katherine E. Weaver, Akhlesh Lakhtakia +1
Near-field phase-shifting contact lithography is modeled to characterize electromagnetic absorption in a photoresist layer with one face in contact with a quartz binary phase-shift…
physics.optics2003★ 60 cited
Blending of nanoscale and microscale in uniform large-area sculptured thin-film architectures
Mark W. Horn, Matthew D. Pickett, Russell Messier +1
The combination of large thickness ( m), large--area uniformity (75 mm diameter), high growth rate (up to 0.4 m/min) in assemblies of complex--shaped nanowires on lithogr…