J. Swerts

activity

20002025

most citedSOT-MRAM 300mm integration for low power and ultrafast embedded memories

196 citations · 695 across the 22 of their papers we have counts for

collaborators

Showing 2023Show all

2 papers · 1 filter

cond-mat.mtrl-sci2023★ 10 cited

Al $_{3}$ Sc thin films for advanced interconnect applications

Jean-Philippe Soulié, Kiroubanand Sankaran, Valeria Founta +7

Al $_{x}$ Sc $_{1 - x}$ thin films have been studied with compositions around Al $_{3}$ Sc ( $x$ = 0.75) for potential interconnect metallization applications. As-deposited 25 nm thick films w…

physics.app-ph2023

Microwave Properties of Ba-Substituted Pb(Zr $_{0.52}$ Ti $_{0.48}$ )O $_{3}$ after Chemical-Mechanical Polishing

Federica Luciano, Lieve Teugels, Sean McMitchell +13

We have studied the effect of chemical-mechanical polishing (CMP) on the ferroelectric, piezoelectric, and microwave dielectric properties of Ba-substituted PZT (BPZT), deposited b…

Al3​Sc thin films for advanced interconnect applications

Microwave Properties of Ba-Substituted Pb(Zr0.52​Ti0.48​)O3​ after Chemical-Mechanical Polishing

Al $_{3}$ Sc thin films for advanced interconnect applications

Microwave Properties of Ba-Substituted Pb(Zr $_{0.52}$ Ti $_{0.48}$ )O $_{3}$ after Chemical-Mechanical Polishing