60 citations · 92 across the 2 of their papers we have counts for
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cond-mat.mtrl-sci2011★ 32 cited
Noncontact dielectric constant metrology of low-k interconnect films using a near-field scanned microwave probe
Vladimir V. Talanov, André Scherz, Robert L. Moreland +1
We present a method for noncontact, noninvasive measurements of dielectric constant, k, of 100-nm- to 1.5-μm-thick blanket low-k interconnect films on up to 300 mm in diameter wafe…
cond-mat.mtrl-sci2005★ 60 cited
A near-field scanned microwave probe for spatially localized electrical metrology
Vladimir V. Talanov, Andre Scherz, Robert L. Moreland +1
We have developed a near-field scanned microwave probe with a sampling volume of approximately 10 micron in diameter, which is the smallest one achieved in near-field microwave mic…