233 citations · 267 across the 3 of their papers we have counts for
1 paper · 1 filter
B. M. Zwickl, W. E. Shanks, A. M. Jayich +4
We have measured the optical and mechanical loss of commercial silicon nitride membranes. We find that 50 nm-thick, 1 mm^2 membranes have mechanical Q > 10^6 at 293 K, and Q > 10^7…