77 citations · 403 across the 37 of their papers we have counts for
3 papers · 2 filters
Multi-beam RF accelerators for ion implantation
Peter A. Seidl, Arun Persaud, Diego Di Domenico +10
We report on the development of a radio frequency (RF) linear accelerator (linac) for multiple-ion beams that is made from stacks of low cost wafers. The accelerator lattice is com…
Waferscale Electrostatic Quadrupole Array for Multiple Ion Beam Manipulation
K. B. Vinayakumar, A. Persaud, P. A. Seidl +5
We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer based accelerator…
Demonstration of a compact linear accelerator
P. A. Seidl, A. Persaud, W. Ghiorso +5
Recently, we presented a new approach for a compact radio-frequency (RF) accelerator structure and demonstrated the functionality of the individual components: acceleration units a…