3 papers
cond-mat.mtrl-sci2026
All-dry processing of 3C-SiC nanomechanical string resonators for extreme aspect ratios and high intrinsic quality factor
Felix David, Philipp Bredol, Yannick S. Klaß +1
Conventional fabrication of suspended nanomechanical resonators typically relies on wet-chemical process steps and critical point drying, which can compromise sample yield and clea…
cond-mat.mes-hall2025
Monolithic 4H-SiC nanomechanical resonators with high intrinsic quality factors
A. Hochreiter, P. Bredol, F. David +3
We present an extensive study of 4H-SiC nanomechanical resonators electrochemically etched out of a monocrystalline wafer. Combining piezo-driven interferometric determination of t…
cond-mat.mes-hall2024
Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators
Philipp Bredol, Felix David, Nagesh S. Jagtap +4
Hybrid quantum devices enable novel functionalities by combining the benefits of different subsystems. Particularly, point defects in nanomechanical resonators made of diamond or s…