Azmain A. Hossain

activity

20222026

most citedIsotropic plasma-thermal atomic layer etching of superconducting TiN films using sequential exposures of molecular oxygen and SF

_{6} /

_{2}

plasma

20 citations · 35 across the 6 of their papers we have counts for

collaborators

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cond-mat.mtrl-sci2025★ 2 cited

Atomic layer etching of niobium nitride using sequential exposures of O $_{2}$ and H $_{2}$ /SF $_{6}$ plasmas

Azmain A. Hossain, Sela Murphy, David S. Catherall +2

Niobium nitride (NbN) is a metallic superconductor that is widely used for superconducting electronics due to its high transition temperature ( $T_{c}$ ) and kinetic inductance. Proces…

Atomic layer etching of niobium nitride using sequential exposures of O2​ and H2​/SF6​ plasmas

Atomic layer etching of niobium nitride using sequential exposures of O $_{2}$ and H $_{2}$ /SF $_{6}$ plasmas