Azmain A. Hossain

activity

20222026

most citedIsotropic plasma-thermal atomic layer etching of superconducting TiN films using sequential exposures of molecular oxygen and SF

_{6} /

_{2}

plasma

20 citations · 35 across the 6 of their papers we have counts for

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cond-mat.mes-hall2022

Isotropic plasma-thermal atomic layer etching of aluminum nitride using SF $_{6}$ plasma and Al(CH $_{3}$ ) $_{3}$

Haozhe Wang, Azmain Hossain, David Catherall +1

We report the isotropic plasma atomic layer etching (ALE) of aluminum nitride using sequential exposures of SF $_{6}$ plasma and trimethylaluminum (Al(CH $_{3}$ ) $_{3}$ , TMA). ALE was obser…

Isotropic plasma-thermal atomic layer etching of aluminum nitride using SF6​ plasma and Al(CH3​)3​

Isotropic plasma-thermal atomic layer etching of aluminum nitride using SF $_{6}$ plasma and Al(CH $_{3}$ ) $_{3}$