3 citations · 4 across the 6 of their papers we have counts for
6 papers
Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes
Simon J. K. Lang, Alexandra Schewski, Ignaz Eisele +10
We report on the fabrication and characterization of superconducting coplanar waveguide (CPW) resonators based on titanium nitride (TiN) thin films deposited on 200\,mm diameter hi…
Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication
Simon J. K. Lang, Ignaz Eisele, Alwin Maiwald +8
Aluminum (Al) remains the central material for superconducting qubits, and considerable effort has been devoted to optimizing its deposition and patterning for quantum devices. How…
Stability studies on subtractively-fabricated CMOS-compatible superconducting transmon qubits
Chawki Dhieb, Johannes Weber, Samuel Taubenberger +12
Developing fault-tolerant quantum processors with error correction demands large arrays of physical qubits whose key performance metrics (coherence times, control fidelities) must…
Wafer-Scale Characterization of Al/AlxOy/Al Josephson Junctions at Room Temperature
Simon J. K. Lang, Ignaz Eisele, Johannes Weber +13
Josephson junctions (JJs) are the key element of many devices operating at cryogenic temperatures. Development of time-efficient wafer-scale JJ characterization for process optimiz…
Development of TiN/AlN-based superconducting qubit components
Benedikt Schoof, Moritz Singer, Simon Lang +4
This paper presents the fabrication and characterization of superconducting qubit components from titanium nitride (TiN) and aluminum nitride (AlN) layers to create Josephson junct…
Tantalum thin films sputtered on silicon and on different seed layers: material characterization and coplanar waveguide resonator performance
Moritz Singer, Benedikt Schoof, Harsh Gupta +3
Superconducting qubits are a promising platform for large-scale quantum computing. Besides the Josephson junction, most parts of a superconducting qubit are made of planar, pattern…