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20242026
most citedTantalum thin films sputtered on silicon and on different seed layers: material characterization and coplanar waveguide resonator performance

3 citations · 4 across the 6 of their papers we have counts for

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physics.app-ph2024★ 1 cited

Development of TiN/AlN-based superconducting qubit components

Benedikt Schoof, Moritz Singer, Simon Lang +4

This paper presents the fabrication and characterization of superconducting qubit components from titanium nitride (TiN) and aluminum nitride (AlN) layers to create Josephson junct…