13 papers
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…
Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform
Shahid Rauf, Tianhong Wang, Jason Kenney +2
Two-dimensional particle-in-cell simulations of an inductively coupled plasma (ICP) are used to investigate the influence of radio-frequency (RF) current waveform and frequency on…
Resonantly Driven Electron Bernstein Waves in Magnetized Low-Pressure Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The physics of capacitively coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by , where and denote…
Simulation Studies of Resonant Excitation of Electron Bernstein Waves in Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The behavior of capacitive coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by the condition 1 2, where …
Transition Metal Dichalcogenide MoS: oxygen and fluorine functionalization for selective plasma processing
Yury Polyachenko, Yuri Barsukov, Shoaib Khalid +1
Low-temperature plasma processing is a promising technique for tailoring transition metal dichalcogenides (TMDs). For chalcogen substitution processing, a key challenge is to ident…
Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
Alexander V. Khrabrov, Igor D. Kaganovich
In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes…