14 papers · 1 filter
Collisionless Bulk Electron Heating in Resonant Low-Voltage Capacitively Coupled Plasmas
Sarveshwar Sharma, Igor D. Kaganovich, Animesh Kuley +3
We investigate collisionless power absorption in resonant, lowpressure capacitively coupled plasmas (CCPs). In these radio-frequency (RF) discharges, the sheath capacitance almo…
Inductively Coupled Plasma Driven by Asymmetric Triangular Current Waveform
Shahid Rauf, Tianhong Wang, Jason Kenney +2
Two-dimensional particle-in-cell simulations of an inductively coupled plasma (ICP) are used to investigate the influence of radio-frequency (RF) current waveform and frequency on…
Resonantly Driven Electron Bernstein Waves in Magnetized Low-Pressure Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The physics of capacitively coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by , where and denote…
Simulation Studies of Resonant Excitation of Electron Bernstein Waves in Capacitive Discharges
Deepak Gautam, Sarveshwar Sharma, Igor Kaganovich +1
The behavior of capacitive coupled plasma (CCP) discharges is investigated in a mildly magnetized regime, defined by the condition 1 2, where …
Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
Alexander V. Khrabrov, Igor D. Kaganovich
In this study, we report a physical model and a Monte Carlo simulation scheme developed to predict the angular distributions of energetic argon atoms and ions as an ion beam passes…
Laser ion acceleration from concave targets by subpicosecond pulses
K. V. Lezhnin, V. Ospina-Bohórquez, J. Griff-McMahon +6
Laser-driven proton acceleration provides a powerful route for generating ultrashort, high-charge proton beams. Many applications, including secondary neutron sources and inertial…