most citedIntrinsic Origin of Negative Fixed Charge in Wet Oxidation for Silicon Carbide

21 citations · 21 across the 1 of their papers we have counts for

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1 paper

cond-mat.mtrl-sci2012★ 21 cited

Intrinsic Origin of Negative Fixed Charge in Wet Oxidation for Silicon Carbide

Yasuhiro Ebihara, Kenta Chokawa, Shigenori Kato +2

We demonstrate on the basis of first-principles calculations that the formation of carbonate-like moiety in SiO could be the intrinsic origin of negative fixed charge in SiC th…