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Structural, magnetic and mechanical properties of 5 m thick SmCo films for use in Micro-Electro-Mechanical-Systems
Arnaud Walther, Kirill Khlopkov, Oliver Gutfleisch +2
5m thick SmCo films were deposited onto Si substrates using triode sputtering. A study of the influence of deposition temperature (Tdep <= 600 degrees C) on the structural, magn…
Evolution of magnetic and microstructural properties of thick sputtered NdFeB films with processing temperature
Arnaud Walther, Kirill Khlopkov, Oliver Gutfleisch +2
Ta (100 nm) / NdFeB (5 m) / Ta (100 nm) films have been deposited onto Si substrates using triode sputtering (deposition rate ~ 18 m/h). A 2-step procedure was used : deposit…
High performance hard magnetic NdFeB thick films for integration into Micro-Electro-Mechanical-Systems
N. M. Dempsey, Arnaud Walther, Frederic May +3
5m thick NdFeB films have been sputtered onto 100 mm Si substrates using high rate sputtering (18 m/h). Films were deposited at ≤ 500 C and then annealed at 750 C for 1…