High performance hard magnetic NdFeB thick films for integration into Micro-Electro-Mechanical-Systems

N. M. Dempsey, Arnaud Walther, Frederic May +3

5$\mu$m thick NdFeB films have been sputtered onto 100 mm Si substrates using high rate sputtering (18 $\mu$m/h). Films were deposited at ≤ 500 C and then annealed at 750 C for 1…