64 citations · 68 across the 9 of their papers we have counts for
9 papers
Loss Mechanisms in High-coherence Multimode Mechanical Resonators Coupled to Superconducting Circuits
Raquel Garcia Belles, Alexander Anferov, Lukas F. Deeg +14
Circuit quantum acoustodynamics (cQAD) devices have a wide range of applications in quantum science, all of which depend crucially on the quantum coherence of the mechanical subsys…
Autonomous Sampling and SHAP Interpretation of Deposition-Rates in Bipolar HiPIMS
Alexander Wieczorek, Nathan Rodkey, Jan Sommerhäuser +2
High-power impulse magnetron sputtering (HiPIMS) offers considerable control over ion energy and flux, making it invaluable for tailoring the microstructure and properties of advan…
Accurate Reporting of Ion Time-of-Flight during HiPIMS with Gated Front-End Mass Spectrometry
Nathan Rodkey, Jyotish Patidar, Kerstin Thorwarth +1
The quality of high-power impulse magnetron sputtering (HiPIMS) deposited films can often improve through the effective use of metal-ion acceleration, requiring precise measurement…
Auger parameter analysis for TiN and AlN thin films via combined in-situ XPS and HAXPES
O. V. Pshyk, J. Patidar, C. Cancellieri +1
Auger parameter analysis provides in-depth information about the electronic and chemical bonding properties of TiN and AlN thin films, which are relevant across a wide range of tec…
opXRD: Open Experimental Powder X-ray Diffraction Database
Daniel Hollarek, Henrik Schopmans, Jona Östreicher +21
Powder X-ray diffraction (pXRD) experiments are a cornerstone for materials structure characterization. Despite their widespread application, analyzing pXRD diffractograms still pr…
Ferroelectric AlScN thin films with enhanced polarization and low leakage enabled by high-power impulse magnetron sputtering
Federica Messi, Jyotish Patidar, Nathan Rodkey +3
The demand for efficient data processing motivates a shift toward in-memory computing architectures. Ferroelectric materials, particularly AlScN, show great promise for next-genera…
Reducing the oxygen contamination in conductive (Ti,Zr)N coatings via RF-bias assisted reactive sputtering
K. Thorwarth, M. Watroba, O. Pshyk +6
Ternary transition metal nitride coatings are promising for many applications as they can offer improved hardness and oxidation resistance compared to binary counterparts. A common…
Beyond structural stabilization of highly-textured AlN thin film: the role of chemical effects
O. V. Pshyk, J. Patidar, S. Siol
The crystalline quality and degree of c-axis orientation of hexagonal AlN thin films correlate directly with their functional properties. Therefore, achieving AlN thin films of hig…
Advanced chemical state studies of oxide films by lab-based HAXPES combining soft and hard X-ray sources
S. Siol, J. Mann, J. Newman +5
The greater information depth provided in Hard X-ray Photoelectron Spectroscopy (HAXPES) enables non-destructive analyses of the chemistry and electronic structure of buried interf…