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cond-mat.mtrl-sci2024
Reducing the oxygen contamination in conductive (Ti,Zr)N coatings via RF-bias assisted reactive sputtering
K. Thorwarth, M. Watroba, O. Pshyk +6
Ternary transition metal nitride coatings are promising for many applications as they can offer improved hardness and oxidation resistance compared to binary counterparts. A common…
cond-mat.mtrl-sci2024★ 3 cited
Beyond structural stabilization of highly-textured AlN thin film: the role of chemical effects
O. V. Pshyk, J. Patidar, S. Siol
The crystalline quality and degree of c-axis orientation of hexagonal AlN thin films correlate directly with their functional properties. Therefore, achieving AlN thin films of hig…