106 citations · 642 across the 25 of their papers we have counts for
25 papers
Beyond-EUV spectrum of highly-charged gadolinium
M. L. Reitsma, J. Sheil, O. O. Versolato +2
We report ab initio relativistic calculations on the complex Gd and Gd highly-charged ions, which are relevant to beyond-extreme-ultraviolet (BEUV) light sources ba…
Resolving the Blueshift in Calculations of the EUV Spectrum of Multiply Charged Tin Ions
M. L. Reitsma, J. Sheil, O. O. Versolato +2
We report ab initio relativistic calculations on the complex open shell Sn highly charged ion, a prototypical plasma ion relevant for extreme ultraviolet (EUV) nanolithogra…
Characterization of plasmas driven by laser wavelengths in the 1.064-10.6 m range as future extreme ultraviolet light sources
D. J. Hemminga, O. O. Versolato, J. Sheil
We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by laser wavelengths in the m range. Detailed numeri…
Review of the 1st EUV Light Sources Code Comparison Workshop
J. Sheil, O. O. Versolato, V. Bakshi +1
We review the results of the 1st Extreme Ultraviolet (EUV) Light Sources Code Comparison Workshop, which was held online on 3rd November 2020. The goal of this workshop was to prov…
Characterization of angularly resolved EUV emission from 2-m-wavelength laser-driven Sn plasmas using preformed liquid disk targets
R. Schupp, L. Behnke, Z. Bouza +9
The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin targets by several-ns-long 2-m-wavelength laser pulses, are studied in the extreme ul…
Characterization of 1- and 2-m-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light
R. Schupp, L. Behnke, J. Sheil +5
Experimental spectroscopic studies are presented, in a 5.5--25.5nm extreme-ultraviolet (EUV) wavelength range, of the light emitted from plasma produced by the irradiation of tin m…