106 citations · 642 across the 25 of their papers we have counts for
9 papers · 1 filter
Characterization of plasmas driven by laser wavelengths in the 1.064-10.6 m range as future extreme ultraviolet light sources
D. J. Hemminga, O. O. Versolato, J. Sheil
We characterize the properties of extreme ultraviolet (EUV) light source plasmas driven by laser wavelengths in the m range. Detailed numeri…
Review of the 1st EUV Light Sources Code Comparison Workshop
J. Sheil, O. O. Versolato, V. Bakshi +1
We review the results of the 1st Extreme Ultraviolet (EUV) Light Sources Code Comparison Workshop, which was held online on 3rd November 2020. The goal of this workshop was to prov…
Characterization of angularly resolved EUV emission from 2-m-wavelength laser-driven Sn plasmas using preformed liquid disk targets
R. Schupp, L. Behnke, Z. Bouza +9
The emission properties of tin plasmas, produced by the irradiation of preformed liquid tin targets by several-ns-long 2-m-wavelength laser pulses, are studied in the extreme ul…
Characterization of 1- and 2-m-wavelength laser-produced microdroplet-tin plasma for generating extreme-ultraviolet light
R. Schupp, L. Behnke, J. Sheil +5
Experimental spectroscopic studies are presented, in a 5.5--25.5nm extreme-ultraviolet (EUV) wavelength range, of the light emitted from plasma produced by the irradiation of tin m…
Controlling ion kinetic energy distributions in laser produced plasma sources by means of a picosecond pulse pair
Aneta S. Stodolna, Tiago de Faria Pinto, Faisal Ali +7
The next generation of lithography machines uses extreme ultraviolet (EUV) light originating from laser-produced plasma (LPP) sources, where a small tin droplet is ionized by an in…
Sn ion energy distributions of ns- and ps-laser produced plasmas
Alex Bayerle, Mart Johan Deuzeman, Sjoerd van der Heijden +8
Ion energy distributions arising from laser-produced plasmas of Sn are measured over a wide laser parameter space. Planar-solid as well as liquid-droplet targets are exposed to inf…