106 citations · 642 across the 25 of their papers we have counts for
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Energy Level Structure of Sn Ions
J. Scheers, A. Ryabtsev, A. Borschevsky +10
Laser-produced Sn plasma sources are used to generate extreme ultraviolet (EUV) light in state-of-the-art nanolithography. An ultraviolet and optical spectrum is measured from a dr…
Expansion Dynamics After Laser-Induced Cavitation in Liquid Tin Microdroplets
Dmitry Kurilovich, Tiago de Faria Pinto, Francesco Torretti +9
The cavitation-driven expansion dynamics of liquid tin microdroplets is investigated, set in motion by the ablative impact of a 15-ps laser pulse. We combine high-resolution strobo…
Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light
Sten A. Reijers, Dmitry Kurilovich, Francesco Torretti +2
We present and experimentally validate a model describing the sensitivity of the tilt angle, expansion and propulsion velocity of a tin micro-droplet irradiated by a 1 μm Nd:YAG la…
Controlling ion kinetic energy distributions in laser produced plasma sources by means of a picosecond pulse pair
Aneta S. Stodolna, Tiago de Faria Pinto, Faisal Ali +7
The next generation of lithography machines uses extreme ultraviolet (EUV) light originating from laser-produced plasma (LPP) sources, where a small tin droplet is ionized by an in…