most citedTemperature measurement of sub-micrometric ICs by scanning thermal microscopy

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physics.gen-ph2008

Joule Expansion Imaging Techniques on Microlectronic Devices

S. Grauby, L. -D. Patino Lopez, A. Salhi +4

We have studied the electrically induced off-plane surface displacement on two microelectronic devices using Scanning Joule Expansion Microscopy (SJEM). We present the experimental…