most citedTemperature measurement of sub-micrometric ICs by scanning thermal microscopy

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physics.class-ph2007★ 14 cited

Temperature measurement of sub-micrometric ICs by scanning thermal microscopy

S. Gomès, Po Chapuis, F. Nepveu +7

Surface temperature measurements were performed with a Scanning Thermal Microscope mounted with a thermoresistive wire probe of micrometrSurface temperature measurements were perfo…