40 citations · 210 across the 46 of their papers we have counts for
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Bimorph Lithium Niobate Thickness-Shear Overtone Film Bulk Acoustic Resonator
Ziqian Yao, Ian Anderson, Tzu-Hsuan Hsu +3
High quality factor () and overtone operation enable narrow-linewidth acoustic devices with multiple discrete frequencies in a single cavity. Maintaining both high and suffi…
In-Plane Q Anisotropy of Higher-Order XBARs in 128°Y-Cut Lithium Niobate
Byeongjin Kim, Ian Anderson, Ruochen Lu
128Y-cut lithium niobate (LN) laterally field-excited higher-order antisymmetric bulk acoustic resonators (XBARs) have attracted interest for high-frequency acoustic device…
Gradient Residual Stress in Transferred Thin-Film Lithium Niobate and Its Compensation Using Periodically Poled Piezoelectric Bilayers
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +1
In this work, we experimentally investigate the gradient stress (sigma1) in 128 deg Y-cut transferred thin film lithium niobate (TFLN) films with thicknesses from 100 to 460 nm usi…
Single-Crystal AlN Wafer-Based Bulk Acoustic Resonators for Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Kaicheng Pan +5
In this work, we demonstrate the first single-crystal aluminum nitride (AlN) wafer-based thickness-extensional (TE) mode bulk acoustic resonator for piezoelectric power conversion.…