40 citations · 210 across the 46 of their papers we have counts for
25 papers · 1 filter
Bimorph Lithium Niobate Thickness-Shear Overtone Film Bulk Acoustic Resonator
Ziqian Yao, Ian Anderson, Tzu-Hsuan Hsu +3
High quality factor () and overtone operation enable narrow-linewidth acoustic devices with multiple discrete frequencies in a single cavity. Maintaining both high and suffi…
In-Plane Q Anisotropy of Higher-Order XBARs in 128°Y-Cut Lithium Niobate
Byeongjin Kim, Ian Anderson, Ruochen Lu
128Y-cut lithium niobate (LN) laterally field-excited higher-order antisymmetric bulk acoustic resonators (XBARs) have attracted interest for high-frequency acoustic device…
Gradient Residual Stress in Transferred Thin-Film Lithium Niobate and Its Compensation Using Periodically Poled Piezoelectric Bilayers
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +1
In this work, we experimentally investigate the gradient stress (sigma1) in 128 deg Y-cut transferred thin film lithium niobate (TFLN) films with thicknesses from 100 to 460 nm usi…
Single-Crystal AlN Wafer-Based Bulk Acoustic Resonators for Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Kaicheng Pan +5
In this work, we demonstrate the first single-crystal aluminum nitride (AlN) wafer-based thickness-extensional (TE) mode bulk acoustic resonator for piezoelectric power conversion.…
Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +4
In this work, we present the first experimental study of residual stress and post-release beam deflection in 128-degree Y-cut thin-film lithium niobate (TFLN) on Si, revealing pron…
Radial Mode Lithium Niobate Rosen Transformer
Ziqian Yao, Heather Chang, Eric Stolt +4
In this work, we demonstrate the first two-port radial-mode Rosen transformer based on 36Y-cut lithium niobate (LN) for piezoelectric power conversion. The device achieve…
Phononic Combs in Lithium Niobate Acoustic Resonators
Ian Anderson, Jack Kramer, Tzu-Hsuan Hsu +3
Frequency combs consist of a spectrum of evenly spaced spectral lines. Optical frequency combs enable technologies ranging from timing, LiDAR, and ultra-stable signal sources. Micr…
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer
Ziqian Yao, Vakhtang Chuluhadze, Zihuan Liu +5
This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium…
Thermal Endurance of Suspended Thin-Film Lithium Niobate up to 800 °C
Mihir Chaudhari, Lezli Matto, Naveed Ahmed +8
The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, p…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…
Periodically Poled Piezoelectric Lithium Niobate Resonator for Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Lezli Matto +8
As the demand for compact and efficient power conversion systems increases, piezoelectric power converters have gained attention for their ability to replace bulky magnetic inducto…
High-Q Millimeter-Wave Acoustic Resonators in Thin-Film Lithium Niobate Using Higher-Order Antisymmetric Modes
Vakhtang Chulukhadze, Jack Kramer, Tzu-Hsuan Hsu +2
This letter presents miniature millimeter wave (mmWave, above 30 GHz) acoustic resonators based on a single-layer thin-film lithium niobate (LN) platform. More specifically, we pre…
Thin-film scandium aluminum nitride bulk acoustic resonator with high Q of 208 and K2 of 9.5% at 12.5 GHz
Sinwoo Cho, Yinan Wang, Eugene Kwon +9
This work describes sputtered scandium aluminum nitride (ScAlN) thin-film bulk acoustic resonators (FBAR) at 12.5 GHz with high electromechanical coupling (k2) of 9.5% and quality…
Thermal Resilience of Suspended Thin-Film Lithium Niobate Acoustic Resonators up to 550 °C
Mihir Chaudhari, Naveed Ahmed, Vivek Tallavajhula +4
This paper reports a suspended thin-film lithium niobate (LN) piezoelectric resonator platform surviving high annealing temperatures of 550 °C, among the highest temperature at whi…
Lithium Tantalate Bulk Acoustic Resonator For Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Eric Stolt +3
We present the first lithium tantalate (LT) thickness-extensional (TE) mode bulk acoustic resonators designed for piezoelectric power conversion, showcasing a low temperature coeff…
Acoustic resonators above 100 GHz
Jack Kramer, Bryan T. Bosworth, Lezli Matto +8
Piezoelectric resonators are a common building block for signal processing because of their miniature size, low insertion loss, and high quality factor. As consumer electronics pus…
Low-Loss Higher-Order Cross-Sectional Lamé Mode SAW Devices in 10-20 GHz Range
Ian Anderson, Tzu-Hsuan Hsu, Vakhtang Chulukhadze +6
This paper presents surface acoustic wave (SAW) acoustic delay lines (ADL) for studying propagation loss mechanisms in Lithium Niobate (LN). Devices were fabricated by depositing 5…
Lithium Niobate Resonators for Power Conversion: Spurious Mode Suppression Via an Active Ring
Vakhtang Chulukhadze, Eric Allen Stolt, Clarissa Daniel +2
In an effort to shift the paradigm of power conversion, acoustic resonators pose as compact alternatives for lossy magnetic inductors. Currently, the acoustic resonator's restricte…
18 GHz Solidly Mounted Resonator in Scandium Aluminum Nitride on SiO2/Ta2O5 Bragg Reflector
Omar Barrera, Nishanth Ravi, Kapil Saha +12
This work reports an acoustic solidly mounted resonator (SMR) at 18.64 GHz, among the highest operating frequencies reported. The device is built in scandium aluminum nitride (ScAl…
Acoustic and Electromagnetic Co-Modeling of Piezoelectric Devices at Millimeter Wave
Tianyi Zhang, Yen-Wei Chang, Omar Barrera +3
This work reports the procedure for modeling piezoelectric acoustic resonators and filters at millimeter wave (mmWave). Different from conventional methods for lower frequency piez…
2 to 16 GHz Fundamental Symmetric Mode Acoustic Resonators in Piezoelectric Thin-Film Lithium Niobate
Vakhtang Chulukhadze, Jack Kramer, Tzu-Hsuan Hsu +5
As 5G connectivity proliferates, signal processing applications at 6G centimeter bands have gained attention for urban wireless capacity expansion. At sub-5 GHz, acoustic resonator…
Ultra-Wideband Tapered Transducers in Thin-Film Lithium Niobate on Silicon Carbide
Jack Kramer, Tzu-Hsuan Hsu, Joshua Campbell +1
Acoustic devices offer significant advantages in size and loss, making them ubiquitous for mobile radio frequency signal processing. However, the usable bandwidth is often limited…
Experimental Study of Periodically Poled Piezoelectric Film Lithium Niobate Resonator at Cryogenic Temperatures
Jack Kramer, Omar Barrera, Sinwoo Cho +3
This work reports the first study of periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) resonators at cryogenic temperatures. We experimentally investigate the te…
23.8-GHz Acoustic Filter in Periodically Poled Piezoelectric Film Lithium Niobate With 1.52-dB IL and 19.4% FBW
Sinwoo Cho, Omar Barrera, Jack Kramer +5
This paper reports the first piezoelectric acoustic filter in periodically poled piezoelectric film (P3F) lithium niobate (LiNbO3) at 23.8 GHz with low insertion loss (IL) of 1.52…