40 citations · 210 across the 46 of their papers we have counts for
49 papers
High-Velocity Whip-Mode Microresonator in LTOI Unimorph: Measurement Methodology and Large-Signal Characterization
Tzu-Hsuan Hsu, Zihuan Liu, Harshvardhan Gupta +6
This paper presents the design, characterization, and large-signal measurement methodology of a high-order whip-mode flexural microresonator on a lithium tantalate-on-insulator (LT…
Toward Ku-Band Surface Acoustic Wave Delay Lines on AlScN-on-Diamond with Decoupled Phase and Group Velocities
Tzu-Hsuan Hsu, Kapil Saha, Yuchen Ma +4
This work reports surface acoustic wave (SAW) acoustic delay lines (ADLs) on an aluminum scandium nitride (AlScN) on diamond platform operating in the X band and approaching the Ku…
Bimorph Lithium Niobate Thickness-Shear Overtone Film Bulk Acoustic Resonator
Ziqian Yao, Ian Anderson, Tzu-Hsuan Hsu +3
High quality factor () and overtone operation enable narrow-linewidth acoustic devices with multiple discrete frequencies in a single cavity. Maintaining both high and suffi…
Emergence of millimeter-wave resonances in self-assembled ferroelectric metamaterials
Florian Bergmann, Peter Meisenheimer, Aiden Ross +26
Resonators are a key component in modern communications and computing. As demand and technological advances push component requirements into the terahertz regime, there is signific…
In-Plane Q Anisotropy of Higher-Order XBARs in 128°Y-Cut Lithium Niobate
Byeongjin Kim, Ian Anderson, Ruochen Lu
128Y-cut lithium niobate (LN) laterally field-excited higher-order antisymmetric bulk acoustic resonators (XBARs) have attracted interest for high-frequency acoustic device…
Q-Enhanced SH-SAW Ladder Filter in Thin-Film Lithium Tantalate Using Bartlett Apodization
Taran Anusorn, Tzu-Hsuan Hsu, Yuchen Ma +1
Shear-horizontal surface acoustic wave (SH-SAW) filters have shown strong potential for low-loss, compact, GHz-frequency RF front ends. In this work, we demonstrate a high-performa…
High Coupling Tunable Acoustic Resonators in Monolithic Barium Titanate
Ian Anderson, Agham Posadas, Alexander A. Demkov +1
The growing number of wireless communication bands has driven demand for compact, low-loss, and frequency adjustable RF filtering. Tunable acoustic resonators are well suited to ad…
Spurious-Free Lithium Niobate Bulk Acoustic Wave Resonator with Grounded-Ring Electrode
Vakhtang Chulukhadze, Kristi Nguyen, Eric Stolt +6
High-performance piezoelectric resonators are promising energy storage elements for piezoelectric power conversion due to their compact footprint and low loss at frequencies where…
Thin Film AlN Microbolometer for Very Long-Wave Infrared Detection
Vivek Tallavajhula, Zarko Sakotic, Ian Anderson +3
We demonstrate a suspended thin-film aluminum nitride (AlN) microbolometer for narrowband very long-wave infrared detection. The device uses a 100-nm-thick AlN membrane suspended a…
Gradient Residual Stress in Transferred Thin-Film Lithium Niobate and Its Compensation Using Periodically Poled Piezoelectric Bilayers
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +1
In this work, we experimentally investigate the gradient stress (sigma1) in 128 deg Y-cut transferred thin film lithium niobate (TFLN) films with thicknesses from 100 to 460 nm usi…
Nonlinear Characterization of Thin-Film LiNbO3 Acoustic Filters
Omar Barrera, Bryan T. Bosworth, Taran Anusorn +10
Compact, high-performance components in millimeter-wave (mmWave) communication systems demand new acoustic filter technology at increasingly higher frequencies. Among various promi…
Single-Crystal AlN Wafer-Based Bulk Acoustic Resonators for Piezoelectric Power Conversion
Ziqian Yao, Clarissa Daniel, Kaicheng Pan +5
In this work, we demonstrate the first single-crystal aluminum nitride (AlN) wafer-based thickness-extensional (TE) mode bulk acoustic resonator for piezoelectric power conversion.…
Non-reciprocal electrooptic intermodal scattering with momentum engineered RF waves
Jieun Yim, Gwan In Kim, Violet Workman +4
Spatiotemporal modulation approaches have been often employed as alternatives for producing optical non-reciprocity without magneto-optic materials. Unidirectional inter-modal scat…
Tunable Ferroelectric Acoustic Resonators in Monolithic Thin-Film Barium Titanate
Ian Anderson, Agham Posadas, Alexander A. Demkov +1
The increasing development of wireless communication bands has motivated the development of compact, low-loss, and frequency adjustable RF filtering technologies. Acoustic resonato…
Lattice XBAR Filters in Thin-Film Lithium Niobate
Taran Anusorn, Byeongjin Kim, Ian Anderson +2
This work presents the demonstration of lattice filters based on laterally excited bulk acoustic resonators (XBARs). Two filter implementations, namely direct lattice and layout-ba…
Uncooled low-noise thin-film optomechanical resonator for thermal sensing on lithium niobate
Yue Yu, Ran Yin, Ian Anderson +9
Optomechanical transduction harnesses the interaction between optical fields and mechanical motion to achieve sensitive measurement of weak mechanical quantities with inherently lo…
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducers
Vakhtang Chulukhadze, Zihuan Liu, Ziqian Yao +8
Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely utilized in applications that demand mechanical resilience, thermal stability, and compact form factors. Recen…
Residual Stress Anisotropy In Thin-Film Lithium Niobate For Stress-Managed MEMS
Byeongjin Kim, Ian Anderson, Tzu-Hsuan Hsu +4
In this work, we present the first experimental study of residual stress and post-release beam deflection in 128-degree Y-cut thin-film lithium niobate (TFLN) on Si, revealing pron…
Radial Mode Lithium Niobate Rosen Transformer
Ziqian Yao, Heather Chang, Eric Stolt +4
In this work, we demonstrate the first two-port radial-mode Rosen transformer based on 36Y-cut lithium niobate (LN) for piezoelectric power conversion. The device achieve…
Phononic Combs in Lithium Niobate Acoustic Resonators
Ian Anderson, Jack Kramer, Tzu-Hsuan Hsu +3
Frequency combs consist of a spectrum of evenly spaced spectral lines. Optical frequency combs enable technologies ranging from timing, LiDAR, and ultra-stable signal sources. Micr…
62.6 GHz ScAlN Solidly Mounted Acoustic Resonators
Yinan Wang, Byeongjin Kim, Nishanth Ravi +13
We demonstrate a record-high 62.6 GHz solidly mounted acoustic resonator (SMR) incorporating a 67.6 nm scandium aluminum nitride (Sc0.3Al0.7N) piezoelectric layer on a 40 nm buried…
Bimorph Lithium Niobate Piezoelectric Micromachined Ultrasonic Transducer
Ziqian Yao, Vakhtang Chuluhadze, Zihuan Liu +5
This work demonstrates a prototype bi-layer piezoelectric micromachined ultrasonic transducer (PMUT) based on transferred periodically poled piezoelectric film (P3F) X-cut lithium…
Thermal Endurance of Suspended Thin-Film Lithium Niobate up to 800 °C
Mihir Chaudhari, Lezli Matto, Naveed Ahmed +8
The need for high-temperature piezoelectric microelectromechanical systems (MEMS) requires pushing piezoelectric platforms to their thermal limits. In harsh thermal environments, p…
An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges
Sinwoo Cho, Byeongjin Kim, Lezli Matto +9
This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electro…