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cond-mat.mes-hall2025
Overlay-aware Variation Study of Flip FET and Benchmark with CFET
Wanyue Peng, Haoran Lu, Jingru Jiang +5
In this work, we carried out an overlay-aware variation study on Flip FET (FFET) considering the impact on RC parasitics induced by the lithography misalignment in backside process…
cond-mat.mes-hall2024
From Flip FET to Flip 3D Integration (F3D): Maximizing the Scaling Potential of Wafer Both Sides Beyond Conventional 3D Integration
Heng Wu, Haoran Lu, Wanyue Peng +13
In this work, we proposed a new 3D integration technology: the Flip 3D integration (F3D), consisting of the 3D transistor stacking, the 3D dual-sided interconnects, the 3D die-to-d…